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3M™ Silicon Nitride Electronic Ceramic Components

3M ID B40070810
  • Excellent mechanical properties
  • Wear resistant
  • High purity
  • Electrical properties tailored for semiconductor
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Product Details

3M™ Silicon Nitride 147A is a high purity grade of silicon nitride used for a variety of semiconductor components including focus rings, gas distributor plates and radio frequency (RF) windows.

  • Excellent mechanical properties
  • Wear resistant
  • High purity
  • Electrical properties tailored for semiconductor
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