3M™ Silicon Nitride 147A is a high purity grade of silicon nitride used for a variety of semiconductor components including focus rings, gas distributor plates and radio frequency (RF) windows.
3M™ Silicon Nitride 147A is a hot pressed, high purity ceramic material that can be formulated into a variety of compositions with minimal densification aids. It offers a cost-effective solution when complex net shapes are required along with both hardness and toughness. Final properties can be adjusted by altering the amount and type of densification aids. Finished components are machined at our precision diamond grinding facility.