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3M™ Liqui-Cel™ Membrane Contactors for microelectronics and semiconductor

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  • As semiconductor processing, flat panel display manufacturing and other high-technology industries move to smaller line widths, larger wafer sizes and advancing display technology, dissolved gas control is a critical consideration within the production of quality ultra-pure water for semiconductor and microelectronics.

    Due to their efficiency, simplicity and high gas removal performance, 3M™ Liqui-Cel™ Membrane Contactors are considered the benchmark in degassing technology within semiconductor and flat panel display process water treatment systems. Membrane contactors have low extractables and do not negatively impact water quality. With proper system design, they can remove O₂ from water down to less than 1 ppb and dissolved CO₂ dissolved to 0.5 ppm. Low dissolved oxygen levels protect product yields, while low CO₂ levels may help maximise the efficiency of electrodionization (EDI) and other ion exchange processes.

    Unlike conventional vacuum towers membrane contactor systems can be expanded. As water volume requirements grow, or dissolved gas specifications get lower, additional contactors can be added to a system to meet changing needs.

    3M™ Liqui-Cel™ Membrane Contactors also enable low concentrations and precision control of dissolved gases in ultra-pure water and other compatible wet bench processes fluids.


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Dissolved gas control – featured membrane contactors for microelectronics and semiconductor

  • 3M™ Liqui-Cel™ EXF-10x28 Series Membrane Contactor Product Photo

    3M™ Liqui-Cel™ EXF-10x28 Series Membrane Contactor for high purity water polishing loops

  • 3M™ Liqui-Cel™ EXF-14x28 Series Membrane Contactor Product Photo

    3M™ Liqui-Cel™ EXF-14x28 Series Membrane Contactor for make-water loops

  • 3M™ Liqui-Cel™ 4x13 SP Series Membrane Contactor

    3M™ Liqui-Cel™ 4x13 SP Series Membrane Contactors for wet bench process solutions


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Resources for dissolved gas control and membrane contactors for microelectronics and semiconductor

Data sheets
Product drawings

2.5x8 Product Drawings
 

4x13 Product Drawings
 

4x28 Product Drawings
 

6x28 Product Drawings
 

10x28 Product Drawings
 

14x28 Product Drawings
 

14x40 Product Drawings
 

Generic system P&IDs
Operating and technical guides
Publications and case studies

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Need help selecting the right membrane contactors for microelectronics and semiconductor, system sizing or questions about the technology?

3M United Kingdom plc
3M Centre, Cain Road
Bracknell
RG12 8HT
United Kingdom
Phone: +44 (0)845 602 5237
purification.uk@mmm.com

3M United Kingdom plc
3M Centre, Cain Road
Bracknell
RG12 8HT
United Kingdom
Phone: +44 (0)845 602 5237
purification.uk@mmm.com

3M Deutschland GmbH
Öhder Straße 28
42289 Wuppertal Germany
Phone: +49 202 6099 -0
Fax: +49 202 6099 - 750

3M Deutschland GmbH
Öhder Straße 28
42289 Wuppertal Germany
Phone: +49 202 6099 -0
Fax: +49 202 6099 - 750

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