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Improve dissolved gas control efficiency in your microelectronics facility

3M solutions for dissolved gas control

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Dissolved Gas Control

As semiconductor processing, flat panel display manufacturing and other high-tech industries move to smaller line widths, larger wafer sizes and advancing display technology, dissolved gas control is a critical consideration in ultra-pure water quality.

Because of their efficiency, simplicity and high gas removal performance, 3M™ Liqui-Cel™ Membrane Contactors are a widely used degassing technology in the semiconductor and flat panel display water treatment systems.

Unlike conventional vacuum towers these membrane degasser systems can be expanded. As water volume requirements grow or dissolved gas specifications get lower additional contactors can be added to a system to meet the changing needs.

3M Liqui-Cel Membrane Contactors also enable low concentrations and precision control of the dissolved gases in ultra-pure water and other compatible wet bench processes fluids.


3M Liqui-Cel Membrane Contactor — How It Works

Advanced Dissolved Gas Control

Applications for Dissolved Gas Control

3M™ Liqui-Cel™ Membrane Contactors provide efficient dissolved gas control in a compact design. Capable of adding gases to or removing dissolved gases and bubbles from compatible liquid streams, these gas transfer devices utilize hollow fiber membrane technology that may help facilities around the world improve operating efficiency, performance and protect product quality. They have displaced vacuum towers, forced draft deaerators, and oxygen scavengers around the world for over 20 years. 3M supports your projects with knowledgeable technical support and service by working collaboratively to ensure solutions meet requirements and expectations.

O₂ and CO₂ Removal

3M™ Liqui-Cel™ Membrane Contactors remove O₂ from water down to less than 1 ppb and dissolved CO₂ to 0.5 ppm. Low dissolved oxygen levels help protect product yields, while low CO₂ levels may help improve the efficiency of electrodionization (EDI) and other ion exchange processes. Membrane contactors are compact, operate in-line and do not require chemicals in operation.

3M Liqui-Cel Membrane Contactors have displaced vacuum towers, forced draft deaerators, and oxygen scavengers around the world for over 20 years. 3M supports your projects with deep technical support and service by working collaboratively to ensure solutions meet requirements and expectations.


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Plating Electrolyte

Electroplating solutions require both stringent particle and dissolved gas control to prevent defects and impurities in the deposited metal layer. 3M has both particle and dissolved gas solutions to meet the needs for your electroplating process.


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Ammonia Waste Treatment

3M Liqui-Cel Membrane Contactors are used in a variety of gas transfer applications to strip dissolved gases from aqueous fluids. In one specific use, ammonia gas is stripped off from feed waters with high ammonia content and is directly absorbed into a reactive acid solution.

This simultaneous removal and recovery of ammonia is possible in a single device. This process is called TMCS (Transmembrane Chemisorption). 3M Liqui-Cel Membrane Contactors are used in a variety of gas transfer applications to strip dissolved gases from aqueous fluids. In the Transmembrane Chemisorption (TMCS) process, ammonia gas is stripped from wastewater streams with a high concentration of ammonia, diffuses across the wall of a hollow fiber membrane, and is directly absorbed into a reactive acid solution. This makes simultaneous removal and recovery of ammonia possible in a single device.


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Functional Water

The most widely known application for 3M™ Liqui-Cel™ Membrane Contactors is efficient removal of dissolved gasses such as oxygen from ultrapure water to extremely low levels. The microporous membrane in 3M Liqui-Cel Membrane Contactors is also efficient at adding pure gases and custom gas mixtures back to UPW. Sometimes referred to as “functional water”, small yet precise amounts of gases such as CO₂, NH₃, N₂ and H₂ can be added to ultrapure water to adjust conductivity levels or to help enhance the cleaning efficiency of UPW in various manufacturing steps.

3M Liqui-Cel Membrane Contactors allow for automated, precise gas addition control while avoiding bubble formation and with little or no waste.


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Key Resources

Find more information for reliable and cost-effective filtration solutions for your microelectronics manufacturing operation.

Brochures
Technical / Application Briefs

Inlet Water & Sweep Gas Guidelines for 3M™ Liqui-Cel™ Membrane Contactors (Operating Guidelines)(PDF, 84.7 KB)

Ion Exchange: Using Membrane Contactors for CO₂ Removal to Extend Resin Bed Life (Article)(PDF, 137 KB)

Ultrapure Water: Systems for Microelectronics (Article)(PDF, 2.2 MB)

Microelectronics: Lessons Learned - The Installation of a 300 to 600 GPM Semiconductor High-Purity Water System (Article)(PDF, 47.6 KB)

Microelectronics: Membrane Processes for Water Treatment in the Semiconductor Industry (Article)(PDF, 88.7 KB)

Membranes: How to Meet Today's Dissolved Oxygen Specifications with Degasification Membranes (Article)(PDF, 93.7 KB)

Precise Control of Dissolved O2 and N2 in Semiconductor Applications Using 3M™ Liqui-Cel™ Membrane Contactors (Technical Brief)(PDF, 202 KB)

IMEC UPW System Utilizes 3M™ Liqui-Cel™ Membrane Contactors for Oxygen Removal (Technical Brief)(PDF, 160 KB)

3M™ Liqui-Cel™ Membrane Contactors Improve Water Quality and EDI Performance (Technical Brief)(PDF, 283 KB)

Chemical Mechanical Planarization - Slurry Distribution System (Customer Application Brief)(PDF, 3.5 MB)

Filtration in Process Cooling Water (Customer Application Brief)(PDF, 120 KB)

Next Generation Purification Method for Achieving Low Trace Metals in Ultra-high Purity Chemicals (Technical Brief)(PDF, 535 KB)

3M Immobilized Micro-Bed IonExchange Resin Bed Technology Treatment of PGMEA (Technical Brief)(PDF, 593 KB)

Next Generation Composite, Rigid Filter for Chemical Mechanical Planarization (Technical Brief)(PDF, 443 KB)

Impacts of Point-of-Use Filtration on an ILD CMP Process (Technical Brief)(PDF, 533 KB)

Data Sheets