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3M™ Light-To-Heat-Conversion Release Coating

  • Enables stress free, room temperature debonding of adhesive to glass carrier interface with laser irradiation
  • Compatible with typical semiconductor chemistries and processes
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3M™ Light-To-Heat-Conversion Release Coating (LTHC) ink is a solvent based coating applied using a spin coating method. This coating forms the light to heat conversion layer on a glass substrate for 3M™ Wafer Support System.

  • Enables stress free, room temperature debonding of adhesive to glass carrier interface with laser irradiation
  • Compatible with typical semiconductor chemistries and processes