3M™ Trizact™ Pad Conditioner

Products
  • Precisely engineered 3D microreplicated ceramic structures coated with CVD diamond
  • Accurately controlled microreplicated structures
  • Consistent performance disk-to-disk and the metal-free cutting surface
  • Ideal for advanced node processes sensitive to metallic contamination
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Carrier Size
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Specifications
Abrasive Working Surface
B5-M990 pattern
Applications
CMP
Carrier Color
Grey
Carrier Format
Stainless steel carrier - with universal mouting configuration
Carrier Material
304 Stainless Steel
Carrier Size
4.25 inch diameter
CMP Process
AL
Mineral Type
CVD coated ceramic
Overall Diameter (Metric)
107.95 mm
Product Series
B5-M990
Product Type
Diamond Pad Conditioner
Product Details
  • Precisely engineered 3D microreplicated ceramic structures coated with CVD diamond
  • Accurately controlled microreplicated structures
  • Consistent performance disk-to-disk and the metal-free cutting surface
  • Ideal for advanced node processes sensitive to metallic contamination

Bringing together 3M’s know-how in abrasives, ceramics and microreplication, the 3M™ Trizact™ Pad Conditioner is an innovative pad conditioner for Chemical Mechanical Polishing (CMP) for advanced node semiconductor manufacturing.

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